UCLA researchers in the Department of Chemistry and Biochemistry & Physics and Astronomy have developed a novel method to lithograph two polished solid surfaces by using a simple mechanical alignment jig with piezoelectric control and a method of pressing them together and solidifying a material.
This technology relates to the process and system for making microparticles and nanoparticles. Applications include lithography and patterning microelectronic and nanoelectronic structures for MEMS technology. The global market for MEMS devices and production equipment was worth $11.7 billion in 2014. This market is expected to reach $12.8 billion in 2015 and $21.9 billion by 2020. In the internet of things, MEMS technology, as well as microscopic particle production, is heavily utilized in commercial applications.
Researchers at UCLA have developed a novel method for microparticle fabrication that is more efficient than the current lithographic practices of using optical exposure to create LithoParticles. The basic concept is to make microscale and nanoscale particles by 1) using a solid patterned form, 2) depositing a material into the form made using lithography to 3) create discontiguous depressions or other predetermined discrete features (i.e. desired particle shapes) 4) turning the deposited material into a solid (if it is not already) and 5) separating the solid particulates of deposited material from the patterned form which usually involves dispersing the particles in fluid.With a solid patterned form, which can be re-used, particles can be made without the need for complex expensive exposure systems such as optical lithography or electron-beam lithography. This lithographic process provides robust means of producing shape-designed particles in parallel at higher throughput levels than single optical systems.
|United States Of America||Issued Patent||8,562,892||10/22/2013||2007-234|
Micro, Nano, Lithography, MEMS, Manufacturing, patterning, microelectronics fabrication, Mechanical process, creating particles in fluid, template, LithoParticles, nanoparticles, microparticles