Technique for the Nitride Growth of Semipolar Thin Films, Heterostructures, and Semiconductor Devices

Tech ID: 25247 / UC Case 2005-668-0

Brief Description

A method to grow semipolar (Ga, Al, In, B)N thin films, heterostructures, and devices on suitable substrates or planar templates in which a large area of the semipolar film is parallel to the substrate surface. 

Background

The usefulness of gallium nitride (GaN) and its ternary and quaternary compounds incorporating aluminum and indium has been well established for fabrication of visible and ultraviolet optoelectronic devices. Current nitride technology for these devices uses nitride films grown along the polar c-direction; however, quantum-well active regions in devices suffer from the quantum-confined Stark effect (QCSE). One way to combat the issue is to grow films on semipolar planes of GaN in order to improve device performance by reduce polarization effects and increasing the efficiency of optical transitions. 

Description

Researchers at UC Santa Barbara have developed a method to grow semipolar (Ga, Al, In, B)N thin films, heterostructures, and devices on suitable substrates or planar templates in which a large area of the semipolar film is parallel to the substrate surface. The method uses vapor phase epitaxy, such as metalorganic chemical vapor deposition (MOCVD), in order to grow the semipolar structures. Additionally, this technique alters the crystal growth orientation in order to reduce polarization effects in nitride thin films. This method is stable, energy efficient and cost-effective. 

Advantages

  • Reduces the negative impact of polarization
  • Improved device efficiency
  • Improved crystal growth orientation

Applications

  • LEDs and Laser Diodes (LDs)
  • Semiconductors

Patent Status

Country Type Number Dated Case
United States Of America Issued Patent 9,793,435 10/17/2017 2005-668
United States Of America Issued Patent 9,231,376 01/05/2016 2005-668
United States Of America Issued Patent 8,686,466 04/01/2014 2005-668
United States Of America Issued Patent 7,846,757 12/07/2010 2005-668
United States Of America Published Application 20180013035 01/11/2018 2005-668
 

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Keywords

indssl, indled, MOCVD, thin films

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