Broad Bandwidth And Highly Reflective Gratings

Tech ID: 17311 / UC Case 2004-004-0


Broadband mirrors with very high reflectivity are essential for applications such as telecommunications, surveillance, sensors and imaging. Among the various conventional mirror designs, metal mirrors have larger reflection bandwidths but lower reflectivities; as a result they are not suitable for fabricating transmission-type optical devices such as etalon filters. Dielectric distributed Bragg reflectors (DBRs) can achieve a higher reflectivity but deposition methods for DBRs are often not precise enough to yield the reflectivities of 99% or better needed for demanding applications, and typical material combinations constrain the mirror bandwidth and can be incompatible with conventional semiconductor processing technologies. In addition the tuning range is often limited for tunable etalon type devices such as MEM vertical cavity surface emitting lasers (VCSELs), filters, and detectors. There is a need for a mirror with broadband reflection, low loss, and compatibility with conventional optoelectronic processing methods.

Researchers at the UC Berkeley have developed a single layer, sub-wavelength grating with a very broad reflection spectrum and very high reflectivity. The grating design facilitates monolithic integration of optoelectronic devices at a wide range of wavelengths from visible to far infrared, as well as integration with electronic circuits and other optoelectronic devices. Grating spectral characteristics can be tailored by choice of materials and structure to maximize both reflectivity and spectral coverage. The grating design developed at Berkeley has potential application in MEM tunable devices and reconfigurable focal plane arrays for such high value applications as optical communications, chemical/biological sensors, and imaging.


Optical telecommunications, Chemical and Biological Sensors, Imaging and Surveillance


Broad reflection spectrum with very high reflectivity; Scalable for wavelengths from visible to far infrared; and Compatible with conventional optoelectronic processing methods

Patent Status

Country Type Number Dated Case
United States Of America Issued Patent 8,189,643 05/29/2012 2004-004
United States Of America Issued Patent 8,059,690 11/15/2011 2004-004
United States Of America Issued Patent 7,304,781 12/04/2007 2004-004


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wireless: system, communications, wireless, sensors, optical, networking, optics

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