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Broadband and Robust Gyroscopes

Adaptive Detection of the Stance Phases in Human Gait Cycles

Prioritizable IMU Array (Prio-IMU) for Enhanced Pedestrian Navigation

A Low-Cost-Wafer-Level Process For Packaging MEMS 3-D Devices

Methods of Self-Calibration for Coriolis Vibratory Gyroscopes

Method of simultaneously and directly generating an angular position and angular velocity measurement in a micromachined gyroscope

Robust Six Degree-Of-Freedom Micromachined Gyroscope With Anti-Phase Drive Scheme

Micromachined Gyroscopes with Two Degrees of Freedom Sense-Mode Oscillator

3-D Folded MEMS Technology For Multi-Axis Sensor Systems

Micro-glassblowing for Gyroscope Fabrication

Micromachined Gyroscope Design Allowing for Both Robust Wide-Bandwidth and Precision Mode-Matched Operation

Temperature-Robust MEMS Gyroscope with 2-DOF Sense-Mode Addressing the Tradeoff Between Bandwidth and Gain

Wafer-Level Micro-Glass Blowing

Micro-glassblowing Technology and Applications

Single-Mask Fabrication Process for Linear and Angular Piezoresistive Accelerometers

Compact Atomic Magnetometer and Gyroscope

Post-Release Capacitance Enhancement in Micromachined Devices

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