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Laser Patterned Self-Aligned Electrodes For Hemispherical Resonator Gyroscope
Broadband and Robust Gyroscopes
Adaptive Detection of the Stance Phases in Human Gait Cycles
Prioritizable IMU Array (Prio-IMU) for Enhanced Pedestrian Navigation
A Low-Cost-Wafer-Level Process For Packaging MEMS 3-D Devices
Micro-glassblowing for Gyroscope Fabrication
Methods of Self-Calibration for Coriolis Vibratory Gyroscopes
Micromachined Gyroscopes with Two Degrees of Freedom Sense-Mode Oscillator
3-D Folded MEMS Technology For Multi-Axis Sensor Systems
Robust Six Degree-Of-Freedom Micromachined Gyroscope With Anti-Phase Drive Scheme
Micromachined Gyroscope Design Allowing for Both Robust Wide-Bandwidth and Precision Mode-Matched Operation
Temperature-Robust MEMS Gyroscope with 2-DOF Sense-Mode Addressing the Tradeoff Between Bandwidth and Gain
Wafer-Level Micro-Glass Blowing
Micro-glassblowing Technology and Applications
Single-Mask Fabrication Process for Linear and Angular Piezoresistive Accelerometers
Compact Atomic Magnetometer and Gyroscope