| Tech ID |
Title |
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| 22960 |
Integrated Sense Devices
University researchers have developed methods, systems and devices relating to the integrated recording, representation and recreation of sight, sound, touch, smell and taste that extend current audio and video capabilities. Potential applications are broad, including consumer electronics, entertainment, communication, e‐health/medical care.
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| | 22909 |
Metals-Semiconductor Nanowire Composites For Thermoelectric Applications
Ever more efficient power generation, based on reliable, economically and environmentally acceptable methods, is a key to harnessing and providing the resources essential for improved life of mankind. One of the promising but yet-to-be-fully-utilized ways to convert wasted heat into useful electricity is to use thermoelectric (TE) power generators. An enormous amount of waste heat could be converted into electrical energy if high-efficiency and highly-scalable TE power generators were available at the cost that is economically acceptable. TE power generators have advantages of few moving parts, low maintenance, and long life. However, the current TE power generators have low efficiency and high cost, which significantly limits the market size. Similarly, it is also difficult to envision ultra large scale implementation at economically acceptable cost based on current proposed approaches. For scalability, TE power generators must overcome the insufficient availability of a large amount of semiconductors in bulk form (i.e., scaling limit) and limited performance due to the interplay between electronic and phonon systems in bulk semiconductors (i.e., performance limit).
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| | 22858 |
Method For Producing High-Efficiency Thermal Materials With Graphene And Metal Fillers
University of California researchers have developed an optimized mixture of graphene and multilayer graphene that utilizes high-yield liquid phase exfoliation techniques to significantly increase the thermal conductivity of thermal interface materials. While current thermal interface materials have thermal conductivity values in the range of ~1 to 5 W/mK at room temperature, University of California researchers have achieved thermal conductivity values at or above 25 W/mK at room temperature with only small graphene loading fractions at 5% by volume. The graphene and few layer graphene are utilized as filler materials with various base (or matrix) materials to form the thermal interface materials.
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| | 22823 |
Interconnecting Micro/Nano Pillar And Walls Transferred Via Shear-Fracturing
Available for licensing are patent rights in a method designed to interconnect micro or nano pillars and walls that have been transferred from a substrate using the shear-fracturing method. The method is useful where electrical contacts are desired, e.g., in solar cells and batteries. The method works in conjunction with the patent pending wall transfer method described in 2008-584 to create electrical contacts on fracture-transferred microstructures.
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| | 22774 |
Method Of Forming Flexible Thermoelectric Devices
Thermoelectric devices are made from rigid bulk or bulk like material which are inherently inflexible. Alternative thermoelectric device designs which incorporate semiconducting nanowires are able to be rigid and yet be flexible. For example, despite the rigidity of semiconducting nanowires they can move independently from each other, enabling flexible thermoelectric device designs. The use of rigid or semi-rigid electrodes for flexible thermoelectric devices causes many difficulties including but not limited to stiffening the device, creating stresses in the active material contacts, and fracturing the active material and contacts. Flexible metallic materials are essential in developing thermoelectric device as envisioned by UCSC researchers.
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| | 22772 |
Utilizing Electrically Conductive Materials Which Are Flexible And Able To Expand Or Contract In One Or More Directions To Reduce Mechanical -
Thermoelectric devices are on the whole made from inherently inflexible rigid materials. However, alternative thermoelectric devices which incorporate semiconducting nanowires are able to be rigid and yet be flexible. Individual nanowires are fairly rigid but can move independently from each other, enabling flexible thermoelectric device designs. The use of rigid or semi-rigid electrodes for flexible thermoelectric devices causes many difficulties including but not limited to stiffening the device, creating stresses in the active material contacts, and fracturing the active material and contacts. Flexible electrodes are requisite but it is advantageous to utilize electrodes which are not only flexible but stretchable or compressible. This advantage becomes increasingly important as the thickness of the device increases and as the radius of curvature of the intended application decrease.
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| | 22745 |
Nanopillar Photonic Crystal Lasers
Currently, optical microcavity fabrication methods using nanowires require multiple material depositions and additional fabrication steps including precision alignment of the randomly placed nanowires. Further, such microcavities are relatively inefficient at trapping light and consequently require a threshold power of a factor of 1000 or more. Although there are lasers such as the vertical cavity surface emitting lasers (VCSELs) and "top-down" photonic-crystal lasers with higher performance measures, they require the use of thick semiconductor films and thus cannot be incorporated onto integrated circuits without extensive and low yield process steps.
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| | 22683 |
Thresholdless Nanoscale Coaxial Lasers
Semiconductor lasers generate a large amount of undesired spontaneous emission before starting lasing oscillation, which degrades their efficiency and performance substantially. Therefore, lasers that emit almost no spontaneous emission have long been sought. Such 'thresholdless lasers', - where light output versus excitation power has no obvious threshold characteristic - lasing occurs at extremely low excitation powers. These lasers' superior performance is suited to optical applications. Currently there are two main approaches to designing nanolasers. The first utilizes dielectric based structures. Dielectrics have low loss at optical frequencies. There are, however, drawbacks in using dielectric-based nanolasers: they are either large in size or their mode extends far out of the gain region, and thus they exhibit poor gain-mode overlap. The other approach uses metal in a cavity. In recent years, nanoscale metallic, plasmonic, and metallo-dielectric cavities have shown to confine light in ultra-small volumes and to improve the gain-mode spatial overlap. However, existing metal-based nanolasers require high threshold pump power because of the significant absorption loss of the metals at optical frequencies.
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| | 22634 |
A Low Cost Mobile Device to Measure Particle Size and Number Densities in a Liquid Suspension
Researchers at University of California, Davis have developed a cost effective and miniaturized device that can determine the size of particles in suspension with a precision better than 10nm.
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| | 22612 |
Portable Personal Lung Function Monitor
UC Davis researchers have designed a device to measure a various lung function biometrics, including flow rate, peak expiratory flow, and concentrations of various chemical species in human breath. The device is portable, designed for easy patient use, and capable of transmitting data to a physician via an Android mobile phone system.
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| | 22528 |
Methods for Fabricating Metal Nanowires
Methods for the preparation of long, dimensionally uniform, metallic nanowires that are removable from the surface on which they are synthesized. The methods include the selective electro-deposition of metal nanowires at step edges present on a stepped surface, such as graphite, from an aqueous solution containing a metal or metal oxide. Where a metal oxide is first deposited, the metal oxide nanowires are reduced via a gas phase reduction at elevated temperatures to metal nanowires. Alternatively, beaded or hybrid nanowires comprising a metal A into which nanoparticles of a metal B have been inserted may be prepared by first electrodepositing nanoparticles of metal B selectively along step edges of a stepped surface, capping these nanoparticles with a molecular layer of an organic ligand, selectively electrodepositing nanowire segments of metal A between nanoparticles of metal B and then heating the surface of the hybrid nanowire under reducing conditions to remove the ligand layer. In all three methods, the nanowires may be removed from the stepped surface by embedding the wires in a polymer film, and then peeling this film containing the embedded wires off of the stepped surface.
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| | 22357 |
Inkjet-Printed Microshell
Microshell encapsulation processes have been developed for monolithic packaging of MEMS devices using polycrystalline silicon (poly-Si) as a porous encapsulation layer because it can be made permeable to HF when sufficiently thin [1] or electrochemically etched. This reduces release times and penetration of the sealing material. The temperature required to form poly-Si (> 600 oC) is too high for CMOS backend integration, however, precluding the use of this technology in monolithically integrated microsystems. Researchers at the University of California, Berkeley have developed a low-thermal-budget (CMOS-compatible) process for microshell encapsulation of microstructures or nanostructures. Inkjet-printing of nanoparticle ink is used to form a porous microshell through which sacrificial material can be selectively removed to release the microstructures or nanostructures. A second inkjet-printing process using finer nanoparticle ink is used to seal the microshell. The mechanical strength of a printed microshell (which can be >1 micron thick) is sufficient for encapsulating regions greater than 1 mm in length.
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| | 22302 |
Interfacial Packaging for Electronics
Researchers from the UC Davis Biomedical Engineering department have developed an innovative microdevice packaging process which enable capillary-driven micron-scale self-alignment and universal nanopatternable interfacial bonding, without incurring thermal or electrical barriers.
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| | 22267 |
Porous Carbon On-chip Energy Storage Devices
With the development of wireless sensors networks, there is an urgent need for compact power sources. The challenge to developing planar devices to meet these needs is the integration of the electrodes’ high surface area material necessary to ensure a high capacitance. with acceptable performances. To meet this challenge, investigators at University of California at Berkeley have developed polymer derived porous carbon material for on-chip energy storage devices The high porosity of the fabricated material leads to a high specific capacitance and hence, high energy density. The process is highly compatible with planar micro-/nanotechnology. The material is stable at high temperature (< 900°C), and can be used to fabricate on-chip storage devices such as microsupercapacitors able to operate at high temperature.
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| | 22230 |
Photolithography High Resolution Patterning
Photolithography, an essential process in the fabrication of integrated circuits, has undergone continuous advancements that allow patterning of nanometer sized features. For example, features as small as 50 nm can be made by using excimer lasers with wavelengths of 248 nm and 193 nm (i.e., deep ultraviolet light). However, it is not always feasible for scientists to use the short wavelength lasers because they are expensive. A method that allows for high resolution photolithography without large capital expenses will be very useful. Researchers at the University of California, Irvine have developed a photolithography method that allows for high resolution patterning. By using this method, one can get a 20-fold improvement in the limit of resolution in comparison to the inherent resolution of “top-down” processing. In addition, the method is easy to use, inexpensive, and does not require sophisticated instrumentation.
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| | 22141 |
Graphene Flash Memory Device
The increasing market demand for smaller and faster electronics has so far been meet by reducing transistor sizes. However, the trend will soon reach its physical limits. One solution is to incorporate new material such as graphene with silicon-based electronics. Due to its superb properties, graphene has received enormous attention for potential applications. However, practical graphene devices, which can be integrated into state-of-the-art technology, have not been demonstrated.
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| | 22047 |
Poly(4-Methyl2-Pentyne) Templates For Micro/Nanopatterning Process
A major limiting factor today for high-resolution, three-dimensional patterning of polymers and nanoparticles in large area, high rate methods is the templates for molding the materials. Currently, only poly(dimethylsiloxane) (PDMS) has sufficient vapor permeability to accomplish this, and the low modulus of elasticity of this material limits the attainable resolution, alignment, and structural fidelity. To address this challenge, investigators at the University of California have developed a highly rigid, chemically robust, optically transparent and vapor-permeable poly(4-methyl-2-pentyne) template. Normally used in gas separation applications, the investigators have nano-patterned this material to create a template. The template has successfully patterned polymers and nanoparticles using the microfluidic molding technique, with very high fidelity pattern replication. Using this mold material, a resolution of better than 350 nm was achieved to date. Patterns resemble those obtainable with photolithographic methods, with as-designed dimensions, completely straight sides and vertical sidewalls. This material substantially extends the capabilities of soft lithographic processes through its increased rigidity and vapor-permeability. Additionally, the properties of this polymer are ideal for roll-to-roll patterning of polymers and nanoparticles for electronics applications.
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| | 21841 |
Multiple-Input Relay
Nano-electro-mechanical relay technology has been proposed as a potential solution to overcome the fundamental energy-efficiently limit of CMOS technology because it offers the ideal characteristics of zero off-state leakage current and abrupt on off switching behavior which provide for zero static power consumption and aggressive supply voltage (V'DD) scaling. Various digital integrated-circuit (IC) building blocks (logic. memory. and clocking structures) implemented purely with micro-electro-mechanical relays already have been demonstrated recently. Relay designs that incorporate multiple input (gate) electrodes and multiple pairs of output (source/drain) electrodes enable more compact implementation of digital ICs at no incremental process cost. Researchers at he University of California, Berkeley have designed and created the first functional prototype multi-electrode relays, and have demonstrated their capability for versatile and more compact implementation of digital logic circuitry.
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| | 21761 |
Junctionless Semiconductor Light Emitting Diodes and Lasers
Lighting is a major contributor to electricity consumption, accounting for 19 percent of global use and 34 percent in the U.S. The U.S. lighting market is currently dominated by the incandescent light bulb and is only 5percent efficient whereas the fluorescent lamp is 15 to 25 percent efficient. Compact fluorescent lamps (CFLs) have a rated lifespan of 6,000 to 15,000 hours whereas incandescent bulbs have a lifespan of only 750 to 1,000 hours. On the other hand, CFLs contain small amounts of mercury, a neurotoxin, which gets released with breakage. Solid-state luminaires, which are typically based on light-emitting diodes (LEDs), have the potential to revolutionize the industry with higher efficiency, lower maintenance, and better quality/safety, possibly leading to a reduction by half of energy consumed by general illumination.
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| | 21606 |
A Simple Route For Grain Growth In Solution-Processed Crystalline Semiconductors
Solution-processing of semiconductors is being pursued as a more economic route to large-scale production. So far various deposition methods have been attempted such as: electrodepositing, doctor blading, bar coating, and inkjet printing; however, these methods all suffer from small grain sizes in the resulting material that is produced.
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| | 21602 |
Wafer-Scale Formation Of Aligned Nanowires And Nanotubes
One-dimensional nanostructures such as semiconductor nanowires and carbon nanotube arrays have been shown to possess exciting electrical, optical, and mechanical properties. While many of these nanostructures have been made into discrete prototype devices, volume manufacturing is not yet feasible.
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| | 21582 |
Physical Assembly Integration Of Graphene And Dielectrics
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| | 21459 |
Low-Voltage Near-Field Electrospinning Enables Controlled Continuous Patterning of Nanofibers on 2D and 3D Substrates
Researchers at the University of California, Irvine have developed a novel method to continuously pattern nanofibers on 2D and 3D substrates. A unique polymer ink formulation provides the right balance of viscosity and elasticity necessary to enable controlled, seamless near-field electrospinning of nanofibers at very low voltages.
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| | 20895 |
Ultrahigh Sensitivity Quartz Crystal Microbalance
Quartz crystal microbalances (QCMs) with flat electrodes are typically used as mass detectors with monolayer sensitivity. However, the sensitivity of such devices can be increased by enlarging the effective surface area. Researchers in UCI’s Department of Physics have developed a highly sensitive QCM by enlarging the surface area via the application of porous materials deposited on the flat electrodes.
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| | 20779 |
Novel Responsive Polymer System and its 1D Nanohybrid Thin Films
Technological advancement demands new types of transducer materials that can efficiently sense and convert force and energy form one type to another for signal processing and modulation, switching and actuation, sensing and energy harvesting. It is also desirable to have transducer materials that mimic cylindrical outer hair cells and retinal cells and able to detect and convert signals instantly and reliably with exceptionally high coupling efficiency at reduced size. Nanocomposite materials could provide the necessary advantages, but are difficulty to be synthesized with controlled morphology and interface characteristics. The rod-coil copolymer systems have attracted widespread interest in both fundamental understanding of the thermodynamics that control nanoscale self-assembly in polymers, as well as technological implication associated with the unique characteristics of the novel designed systems. With inception of the responsive polymer system designed by the inventors, for the first time, there are opportunities to design materials without the compromises typically found in conventional composites. The rationally synthesized nanomaterials can be processed in a thin film format, which provides a platform for technology innovation.
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| | 20774 |
On-Demand Remote Control of Nanomotor Movement
The use of synthetic nanomotors to power nanomachines and nanofactories is an important challenge in nanotechnology. Designing and building new and powerful nanoscale motors and propulsion modes is the first aspect of the challenge. Second is the need to steer nanomachines along a given direction and towards a specified destination. Precise motion control is essential to meeting the demands of future nanomotor applications, e.g., nanoscale drug delivery, assembly, and patterning. Nanomotor navigation is particularly challenging because of the combined conditions of Brownian motion and low Reynolds numbers.
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| | 20773 |
Enzyme-Logic Biosensing for Rapid Diagnostics
Enzyme-based logic gates and their networks are recent developments in the field of biochemical information processing or biocomputing. Chemical logic gates mimic Boolean logic operations and are composed of chemical systems where the input and output signals are represented by concentrations of reactants and products, respectively. In particular, enzyme-based logic gates perform enzyme-biocatalyzed reactions resembling properties of Boolean logic systems.
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| | 20772 |
Nanomotor Based Fabrication and Patterning of Defined Nanostructures
High-throughput and low-cost techniques for fabrication at sub-50nm scale on wide area substrates are currently a very active and competitive field of cross-disciplinary R&D. Of the recent crop of nanofabrication technologies, dip-pen nanolithography (DPN) is notable for its success in serving the nanofabrication needs of biotechnology, advanced materials, and nano-scale devices. In DPN, molecules in an “ink” are transferred from a coated atomic force microscopy tip to a substrate, forming a pattern as the tip is scanned. DPN however has the disadvantages of slow processing and patterning of small areas and limited parallelization capabilities.
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| | 20767 |
A Double-Dose Ebeam Lithograpy Process
In electron beam lithography (EBL), after developing, the cross section of the resist has a parabolic undercut with a linewidth determined by the exposure in the top resist layer resulting in a typical linewidth of 100nm.
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| | 20728 |
Vertical Nanowire Field-Transistors For Integrated Nanoelectronics
In the past, the alignment of semiconducting nanowires was achieved primarily through growing nanowires on an epitaxial substrate. However, the ordering and the density of nanowires are difficult to control and patterning electrodes to individual wires is highly impractical. Thus, the applications of highly ordered and high-density vertical nanowires arrays for integrated nanocircuits are greatly constrained.
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| | 20727 |
Electrostatic Silicon Thin Film Bulk Acoustic Wave Resonator
Film bulk acoustic wave resonators (FBARs) have been successfully commercialized in wireless front-end architecture as filters and duplexers. Similarly, silicon micromachined resonators have demonstrated excellent fQ values. Such devices have entered the market at HF and VHF ranges but several obstacles need to be overcome for capacitive resonators can be used at UHF frequencies.
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| | 20631 |
Explosive Nanocrystalline Porous Silicon Device
Researchers at UC San Diego have developed a solid state device fabricated from a high surface-area porous silicon substrate and nitrate salts. On ignition, the material produces a very clean burning flame. Although ignition can be initiated by a low voltage source, the device is stable at temperatures above 100 degrees centigrade. Fabrication of this explosive “chip” is compatible with conventional silicon fabrication techniques.
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| | 20497 |
Novel Nanomaterial-based Thermo-Photovoltaic Cells
Currently, thermo-photovoltaic (TPV) cells are based on traditional semiconductor thin-film technology. For a radiation source with a temperature of 1500K, the efficiency of the cell is ~20% during operation at room temperature. However, efficiency decreases greatly with increasing cell temperature. With regards to power conversion in space, it is also difficult to obtain efficiency over 30% when the cell temperature is 400K. Still, TPVs are of great commercial interest.
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| | 20296 |
Nanoelectronic Devices Based On Nanowire Networks
Current, mature semiconductor technologies allow for altering of electrical conducting properties through doping. While state of the art techniques allow for precise doping, manufacturing requires large, expensive capital equipment, and resultant semiconductors are quite rigid and sensitive to defects. Previous attempts at creating nanowires have proved difficult, as doping and controlling their conductive properties is quite difficult. Furthermore, replicating electrical behavior from device to device with current nanowire techniques is difficult and highly sensitive to material defects.
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| | 20149 |
Electronic Devices With Carbon Nanotube Components
Flexible and transparent transistors have recently resulted in several noteworthy achievements. Transparent transistors have been fabricated using both polymers and inorganic oxides. Both have significant deficiencies, however. Polymers have low mobility and inorganic oxides do not have the desired flexibility and simplicity in manufacture. In current transistor configurations, the gate and also the source and drain are metal electrodes, and thus are neither flexible nor transparent. In addition there is usually a large interface resistance between the electrodes and the carbon nanotubes network. Furthermore, there is a need for a simple method of fabrication, where the different layers that form the transistors and the fabrication of the different layers are compatible.
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| | 20080 |
Nanowires From Single-walled Carbon Nanotubes
Nanotubes have the potential to make a major contribution to a variety of nanotechnology applications, including microelectronics, hydrogen storage media for fuel cells, scanning-probe microscope tips, one-dimensional conductors, reinforcing fibers in super-strong carbon composite materials, flat-panel displays, and battery materials. Many attempts have been made to develop filled nanotubes, which are expected to further diversify the applications of this new class of materials. The level of success in filling nanotubes has been limited, however, with problems such as low filling percentages and small length-to-diameter ratios.
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| | 19963 |
Devices And Methods For Electrical Characterization Of Undercut Etch Rates
Currently, optical monitoring is all that is available to monitor undercut etch rates. This method has limitations, as it is not possible to fully measure the remaining material to be etched. Also, this approached makes automation difficult. To meet this challenge, investigators and University of California at Berkeley have developed a method where undercut etch rates can be characterized using purely electrical means. Beams of different widths are undercut by an etchant. Conducting beams are fully undercut when all the material beneath is removed. The fully undercut beams are made to collapse into contact with another conducting "landing" electrode by way of surface tension. By observing the widths of beams which are collapsed, undercut etch rates are measured. By alternating the semiconductor doping type of the beam and the landing electrode, diodes may be formed, making sensing of etch rates possible in an addressed array.
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| | 19574 |
Temperature-Robust MEMS Gyroscope with 2-DOF Sense-Mode Addressing the Tradeoff Between Bandwidth and Gain
University researchers have designed a novel MEMS vibratory rate gyroscope design, which yields devices robust to fabrication and environmental variations, allows flexible selection of operational parameters, and provides increased bandwidth with minimized sacrifice in gain regardless of the selected frequency of operation.
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| | 19241 |
A Direct-Write Piezoelectric Pvdf Nanogenerator
With the advent of implantable medical devices, such as pacemakers, defibulators, and insulin pumps, among others, there has been an ongoing need to provide a safe and compact energy source. Nuclear power, electrical batteries, and chemical sources, such as physiologic sugars, have been used and investigated. Classically, a titanium "can" has been employed to contain the electrical components and battery, to avoid the corrosive effects of body fluids. With the advent of implantable electronics and computer chips, this partially advantageous application is limited by lack of effect availability of an energy source. Investigators at University of California have developed the nanogenerator that can be used for new self-powered nanodevices that harvest electricity from the environment for applications such as implantable biomedical devices, wireless sensors, and portable electronics. This innovation is particularly advantageous for implantable medical devices. This nanogenerator innovation provides for self-powered devices. The nanogenerator can be employed to trickle-feed energy to a battery for higher energy needs, such as implantable defibulators. In this invention, piezoelectric poly(vinylidene fluoride) (PVDF) nanofibers are directly written and polarized simultaneously onto the plastic substrate as nanogenerator using near-field electrospinning (NFES). Repeated and consistent output voltage up to 8.5mV has been generated by the nanogenerator under an external strain of 0.092% from a single PVDF nanofiber, of which the output power would be -7.2 pW.
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| | 18961 |
Nanolasers For Ultra-High Density Heat Assisted Magnetic Recording
For the first time in the history of the multi-billion-dollar data storage industry, the conventional technology cannot be further scaled because of the fundamental limits of the materials. Specifically, superparamagnetism limits memory density in conventional technology. Heat assisted magnetic recording (HAMR) is believed to be one of the most promising alternative technologies developed in order to pack more memory into less space. The success of HAMR and other optical storage technologies depends on having a means to focus light in nanoscale spots with adequate intensity to record data. Currently, methods exist to focus lasers on small spot sizes, but these techniques do not deliver adequate power. Researchers at the University of California have developed a near field optical system capable of delivering light into a spot with a diameter of less than 30 nm and power values of above 100 nW. Furthermore, this technology is scalable down to a 5-nm diameter spot. The device is simple to manufacture using existing technology. The images above depict the UC nanolaser focused on an aluminum coated probe and the corresponding near-field intensity distribution of the spot. UC’s nanolaser could enable recording media with areal densities of greater than 10 terabits per square inch. With this technology the entire library of Congress could be carried in your wrist watch. The nanolaser could be used in various memory applications such as HAMR, protein based memory, and 3-dimensional multilevel recording. Additionally, the nanolaser could be used in future nanooptic or nanophotonics application such as optical interconnects to replace contacts and wires in future electronics, nanolasers for medical applications for ultra-precise diagnostics and surgery.
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| | 18883 |
RF MEMS Technology for Fabricating RF MEMS Switches
University researchers have invented a low-cost, high performance, and substrate independent RF MEMS technology for RF MEMS switch fabrication with high yield and reliability. It is compatible with well established printed circuit board (PCB) technology and allows the choice of any substrate with desired electrical and mechanical properties for a specific communication application, to enhance its performance and reduce cost.
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| | 18864 |
High-Isolation Tunable MEMS Capacitive Switch
For a typical MEMS switch, the resonant frequency is around 20 to 30 GHz which can not be employed by commercial wireless systems operating at a frequency band of 2 to 8 GHz. This resonant frequency can be tuned by changing the inductance of the switch membrane. When inductance is increased, the resonant frequency is moved to a lower frequency band at which location, high isolation is achieved. There have been many published solutions to this problem but it has been found to be difficult to further lower the resonant frequency to C-band levels due to the unrealistically large inductance required.
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| | 18852 |
Microfluidic Flow Transducer Based on the Measurement of Electrical Admittance
The development of multifunctional, high throughput lab-on-a-chip depends heavily on the ability to measure flow rate and perform quantitative analysis of fluids in minute volumes. Traditionally, there have been many microelectromechanical system (MEMS) based flow sensors for gaseous flows. In recent times, there is some advancement in measuring micro flows of liquids. Examples of sensing principles explored in the measurement of microfluidic flow are heat transfer detection molecular sensing, atomic emission detection, streaming potential measurements, electrical impedance tomography, ion-selective field-effect transitor and periodic flapping motion detection. Flow sensors based on sensing the temperature difference require a complicated design and the integration of the heater, temperature sensors and membrane shielding is difficult to implement. Most other methods are not capable of measuring very low flow rates.
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| | 18841 |
Torsional Z-axis Surface-Micromachined Gyroscope
The limited thickness of structural layers attained in current surface-micromachining processes results in very small sensing capacitances and higher actuation voltages, restricting the performance of the surface-micromachined gyroscopes.
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| | 18840 |
Post-Release Capacitance Enhancement in Micromachined Devices
Capacitive detection and actuation are commonly used in micromachined devices due to simplicity of implementation and effectiveness. However, the performance of capacitive sensors and actuators highly depends on the nominal capacitance of the microsystem. For example, in capacitive micromachined inertial sensors (i.e. accelerometers, gyroscopes, etc.) the performance is generally defined by the nominal capacitance of the sensing electrodes. Furthermore, in electrostatically actuated devices, the nominal actuation capacitance determines the required drive voltages. For a small actuation capacitance, large voltages are needed to achieve sufficient forces, which in turn results in a large drive signal feed-through. Thus, it is desired to maximize the sensing capacitance, and minimize the actuation voltages by increasing the actuation capacitance. However, the sensing and actuation capacitances of micromachined devices are limited by the minimum-gap requirement of the fabrication process.
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| | 18839 |
Cell Encapsulation on a Microfluidic Platform
Cell encapsulation is a highly useful tool in cell culturing, assay, and cell-based therapy applications. Encapsulation has traditionally been accomplished by extrusion through a nozzle, forming an air/water emulsion, into a bath containing a polymerizing agent. However, this batch processing technique is characterized by its inability to trap cell droplets before or without polymerization and non-uniform polymerization times across droplet population. Furthermore, minimum droplet size is limited to 400um and size dispersion is pronounced for small droplet geometries.
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| | 18825 |
Fabrication of Suspended Carbon Micro and Nano-scale Structures
Recent attention has focused on high aspect ratio carbon micro-electromechanical (C-MEMS) because of the many applications possible, such as micro-electrodes in electromechanical sensors and miniaturized energy storage/energy conversion devices. Further, suspended micro/nano carbon structures exhibit a wide electrochemical stability window which makes them interesting for integration in mechanical, electrical, and electromechanical measurements. One of the biggest advantages of suspended micro/nano carbon structures is the high surface to volume ratio.Yet, microfabrication of C-MEMS structures using current processing technology, such as focus ion beam (FIB) and reactive ion etching (RIE) tends to be time consuming and expensive. Low feature resolution, and poor repeatability of the carbon composition as well as the widely varying properties of the resulting devices limits the application of screen printing of commercial carbon inks for C-MEMS.
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| | 18809 |
Microfluidic Production of Monodispersed Submicron EmulsionsThrough Filtration and Sorting of Satellite Drops
In the past decade, droplets have been intensively used by the industries as an agent for drug preparations, for plastic polymerizations, and chemical processing. Recent advancements in microfluidic droplet technology has enabled the precise sampling and processing of small volumes of fluids (picoliter to femtoliter) by the controlled viscous shearing in microchannels. Microfluidic technologies has transformed droplets to be used as liquid reaction vessels for screening protein crystallization conditions, as micro templates for assisting self-assembling of materials, as molds for curing polymeric micro spheres, and as components for micro electrical actuator. Programmable fluidic assays for sampling glucose concentration of human physiological fluids, DNA analysis, nano particle synthesis machinery have been individually demonstrated using droplet based microfluidic system. However two drawbacks limit the use of these technologies: 1) the generation of satellite droplets have always being a problem limiting the volume and accuracy of the metered fluid sample. 2) Generation of monodispersed droplets smaller than 1?m has been difficult to achieve. The solution to both problem lies in the use of satellite sorting technologies, in which, satellite droplets, the by product of droplet generation can not only be filtered but also simultaneously be used as a production mechanism for nano-particle synthesis.
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| | 18793 |
Wafer-Level Micro-Glass Blowing
Large scale confinement chambers have been created in the past using traditional glass-blowing techniques. However, conventional glass-blowing can only be used to create large components and requires the components to be made one at a time. Micro-glass spheres have previously been fabricated by letting glass particles fall through a temperature-controlled drop tower. While it is possible to create hollow spheres by introducing a blowing agent in the glass, these micro-spheres are not attached to a substrate and are therefore difficult to integrate with micro-machined components on a wafer.
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| | 18781 |
Wafer Scale Glass Blowing
Large scale confinement chambers have been created in the past using traditional glass-blowing techniques. However, conventional glass-blowing can only be used to create large components and requires the components to be made one at a time. Micro-glass spheres have previously been fabricated by letting glass particles fall through a temperature-controlled drop tower. While it is possible to create hollow spheres by introducing a blowing agent in the glass, these micro-spheres are not attached to a substrate and are therefore difficult to integrate with micro-machined components on a wafer.
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| | 18753 |
A Capacitive Detection Scheme with Inherent Self-calibration for Resonant MEMS
SEVERAL important classes of MEMS devices, such as resonators, gyroscopes, and chemical sensors, rely on resonance phenomenon in their operation. In these devices, resonant motion needs to be actuated, sensed, and controlled. Capacitive phenomena are commonly used for transduction in vibratory MEMS devices due to the ease of fabrication, low sensitivity to temperature changes, and other practical advantages. However, conventional capacitive detection schemes produce a signal proportional to such system parameters as nominal sense capacitance, carrier voltage, and gain of the current amplifier. These dependencies constitute a need to calibrate individual MEMS devices to address fabrication imperfections, and fluctuation of the parameters due to changing environment and aging. A detection technique independent of these system parameters can be of great advantage.
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| | 18746 |
Methods of Manufacturing Microdevices in Laminates, Lead Frames, Packages, and Printed Circuit Boards
Microelectrical-mechanical systems (MEMS) are miniature mechanical devices intended to perform non-electronic functions such as sensing or actuation. These devices are typically built from silicon using lithographic techniques borrowed from the semiconductor industry. This manufacturing technique is expensive and limited. Furthermore, almost all micromachined devices must eventually be placed in a protective housing so that electrical connections can be made to the devices, and to protect the devices. This is troublesome for MEMS devices because they are fragile and so extreme care must be taken to move them from their fabricated substrates (e.g., wafers) to micro-electronic packages. It is well known that 60%-80% of the final cost for a MEMS device is from the costs associated with packaging.
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| | 18731 |
Compact Atomic Magnetometer and Gyroscope
Magnetometers are used for sensing magnetic fields. Applications include geophysical surveying, nuclear magnetic resonance imaging (MRI), magneto-encephalography and perimeter surveillance. Gyroscopes sense rotation. Together, these instruments are used in inertial navigation and platform stabilization such as anti-roll systems in cars. A variety of commercial magnetometers exist with various application areas. Superconducting quantum interference devices (SQUIDS) are highly sensitive but require cryogenic cooling. Atomic magnetometers are even more sensitive but run approximately $10,000 per unit. Commercially available gyroscopes run a similar gamut.
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| | 18043 |
Air Corridor Interconnect Structure
In microchip structures the spaces between the metal elements in an interconnect structure are filled with solid dielectrics that typically have dielectric constants greater than two. This design approach, while somewhat effective, severally limits efforts at miniaturization of electronic components, an important motivator for current consumer products. In response to these challenges, researchers at the University of California, Berkeley have developed a novel structure and method of fabrication of metal elements which are supported by thin dielectric walls and open corridors which separate the walls from each other. Using this approach, the metal elements are effectively separated by the open corridors and not by a solid dielectric material. The corridors may be filled with a vacuum, or a partial vacuum, or a gas such as air, which typically have a dielectric constant of one. As a result, the parasitic capacitances between the metal elements can be reduced by about one-half, leading to improved circuit performance such as faster speed, lower cross-talk, and lower power consumption.
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| | 18024 |
Deep-subwavelength Photolithography
Photolithography is the most widely used micro-fabrication technique as it is a parallel, cost effective, and high throughput process. However, conventional photolithography techniques have a resolution limit that is about half of the illumination light wavelength in free space. To date, various approaches to improve photolithography resolution have developed, but each is flawed. For example, electron-beam lithography, focused ion-beam lithography and dip-pen lithography are slow series processes not suitable for large-area pattern fabrication, and implementing reduced wavelength illumination drastically increases instrument complexity and cost. To address these problems, Researchers at UC Berkeley have developed a family of deep-subwavelength photolithography technologies. These novel technologies are based on adding an artificial metal-dielectric structure to conventional photolithography processes to fabricate reduced patterns of the conventional photolithography masks. The technique overcomes the resolution limit of the conventional photolithography and can achieve deep-subwavelength resolution comparable to that of plasmonic nanolithography and near field contact photolithography. Furthermore, it can fabricate large-area uniform patterns while plasmonic nanolithography can not.
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| | 17877 |
Fully Integrated, Low Cost, Point Of Care Diagnostic System
New medical systems are needed to weather the storm of rising healthcare costs. In particular, Point-of-Care (POC) technologies have the potential to keep costs at bay by enabling affordable preventative diagnostics and personal chronic disease monitoring. Many of these POC technologies use detection schemes that rely on the specific marking of target analyte with labels, such as catalytic enzymes, optical markers or magnetic beads. The latter are very useful as labels for bio-assay applications because a) cells exhibit few if any magnetic properties, b) signals from magnetic beads are stable with time, c) magnetic detection functions regardless of the opacity of the sample, and d) magnetic labeling provides added functionality such as magnetic filtration and manipulation. Integrated detection of magnetic beads has been demonstrated using MR spin valves. Researchers at the University of California have developed a fully integrated system capable of detecting single super-paramagnetic beads using CMOS. The system greatly simplifies detection protocol complexity and reduces overall system cost.
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| | 17861 |
Nanoparticle Transistor Photodetector for Sensing Applications
Quantum dots show great potential for use in next generation optical devices, including photodetection in sensing applications, due to their third order optical response and fast response times. To achieve stability and processability with these nanoparticles, it is ideal to incorporate them into a polymer matrix forming a hybrid material, commonly known as nanocomposites. However, patterning these nanoparticles into nanocomposites is challenging. To address this challenge, researchers at UC Berkeley have developed a novel approach and method for patterning nanocomposites. Using this new Berkeley approach, a nanocomposite film can be patterned and incorporated into a transistor structure in which the film acts as a semiconducting active layer. Additionally, with optical stimulation matching the absorption spectrum of the nanoparticles, the resulting photoconduction can be optimized to create a novel, polymer, transistor-based photodetector. Unlike previous nanocomposite transistors, this new design is simpler to fabricate and uses readily available, inexpensive materials.
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| | 17609 |
Nano-electro-mechanical Non-volatile Memory (nemory)
By the year 2018, MOSFET gate lengths for logic applications are expected to be scaled below l0nm with operating voltages below 1V. However, flash memory transistors are more difficult to scale because of the thick gate-stack equivalent oxide thickness (EOT) requirements for charge storage (threshold voltage shift) and retention. Although advanced transistor structures can be leveraged to improve gate-length scalability, high program/erase voltages are still required for fast operation. Thus, alternative integrated-circuit memory technologies such as magnetic RAM (MRAM) and phase-change memory (PCM) have been heavily investigated in recent years. These alternative memory technologies require new materials which increases process complexity and hence cost. In addition, their scalability to sub-10nm cell size is not assured. Therefore, there is a need for a new non-volatile memory technology that can be as scalable (in size and operating voltage) to match the scaling of logic devices. Researchers at UC Berkeley have developed a new design for nano-scale non-volatile memory. The design fabrication utilizes standard CMOS materials and processes. It leverages established surface micromachining technology and MEMS to achieve an elegantly simple and scalable memory cell structure that can potentially operate with very low voltage levels. The design is ideally suited for use in cross-point memory arrays for very high density non-volatile storage.
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| | 17535 |
Integration Of Advanced Structures With Conventional Integrated Circuits
Technological advances have allowed computer microprocessors to handle data at an extraordinary rate. However, the electrical interconnects within and between microprocessor chips introduce a severe bottle-neck to the flow of data. A promising architecture for next generation interconnects is high-speed and high-bandwidth optical interconnects, which will require heterogeneous integration of compound semiconductors with Si technologies. Some previously-explored methods for creating the optoelectronic circuitry include epitaxial growth, heteroepitaxial growth, and wafer-bonding. However, epitaxial growth of interconnections can produce large physical mismatches between desirable compound semiconductors and silicon; heteroepitaxial growth is complicated, expensive, and requires high processing temperatures that damage silicon-based circuitry; and wafer bonding is extremely susceptible to misalignments. Researchers at the University of California, Berkeley are developing advanced structures and methods for integration of compound semiconductors with conventional integrated circuit components to produce various active and passive optoelectronic components for optical interconnects, sensors, semiconductor lasers and other devices. The structures can accommodate quantum wells or quantum dots. The method under development at Berkeley will eliminate problems with alignment and processing temperature that constrain the application of conventional methods for fabricating optoelectronic circuitry.
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| | 17511 |
A New Approach To Flow Cytometry, "nanocytometry"
Conventional flow cytometry has made valuable contributions to cancer diagnosis and management as well as to the understanding of fundamental cancer cell biology. Flow cytometry is used routinely in the clinical diagnosis of the hematologic malignancies; in tumor immunology to define lymphocyte subsets; and in basic research to facilitate cell separations based on the expression of particular proteins or phospholipids at the cell-surface. However, it does require a large sample of cells and usually requires labeling. Researchers at the University of California, Berkeley have developed a new approach to flow cytometry; the researchers call it "NanoCytomerty." The novel technology uses an integrated microfluidic chip which can adapt to sort cancer and other types of cells based on their cell-surface protein expression. The technology allows for significant improvements over conventional flow cytometry, because the system permits label free signal detection, extreme reproducibility and sensitivity, and cell separations using very few cells. By developing a more sensitive technique to perform cell separations, in addition to one that relies on fewer cells, we anticipate that NanoCytometry could provide an important new technology applicable to cancer. For instance, NanoCytometry could be used to improve upon physicians' ability to detect minimal residual disease states and upon a scientist's ability to study cell populations that occur in very small numbers such as stem cells. Nanocytometry builds upon previous work which includes an all-electronic technique for detecting the binding of unlabeled antibody-antigen pairs (US Patent Appl. # 10/056,103).
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| | 17487 |
Silicon Nanowire Vertical Surrounding-Gate Field Effect Transistors
As semiconductor devices are scaled into the sub 50 nm regime, short-channel effects and poor subthreshold characteristics begin to be problematic for traditional planar transistors. Novel device geometries with enhanced performance, defined by functional density, energy efficiency, scalability, compatibility with CMOS, are required in order to push toward ever higher packing densities in memories and logic chips with ever increasing energy efficiency. University of California investigators have addressed this challenge by providing vertical silicon nanowire array growth with tight control over size «20 nm), uniformity (± 10%), position (allow addressability), density (106_1012 cm·; scalability), and precise doping. They have demonstrated the first silicon nanowire vertical surrounding gate transistor (Si-NW -SGT). This technology provides the possibility of integrating Si nanowire vertical surrounding gate transistors into arrays and stacks for memory and logic technologies. In contrast to currently available mentioned, the investigators approach relies on a bottom-up process to produce the precisely defined "channel" (epitaxial silicon nanowire vertical array) of the proposed surrounding gate transistors. This vertical geometry also readily differentiates from the previous work on nanowire transistors, all of which adopt a lateral device geometry. Using directed colloid seeding for VLS-CVD SiNW synthesis provides precise control over nanowire diameter, growth density, and spatial distribution. At the same time, the SiCl4 precursor is highly effective for the growth of vertically aligned, single-crystalline SiNWs. Moreover, these techniques facilitate the direct integration of nanowires into complex systems such as microfluidic devices. The versatility of these growth control methods stems from the use of SiCl4 as the gas phase precursor. Link to PCT patent application
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| | 17447 |
Method Of Fabricating Patterned Surfaces With Nanoparticles And Nanowires
The capability to pattern closely spaced gold or other nanoparticles has significant potential in nano- electronics and photonics applications such as electrically conducting wires, and as plasmon wave guides. To address this opportunity, researchers at UC Berkeley have developed an innovative method for fabricating nanoscale patterned surfaces with nanoparticles and nanowires. Using this approach, the researchers were able to fabricate lines of closely spaced 10 nm gold nanoparticles that are a single nanoparticle in width. Furthermore, standard plating techniques can be used to transform an assembly of these nanoparticles into nanowires or other continuous patterned features. In comparison to existing methods for depositing arbitrary patterns of nanoparticles such as e-beam lithography, dip-pen nanolithography and several other atomic force microscopy-based methods, this new Berkeley method is simple and direct.
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| | 17325 |
Nano Structure For Electrical Interconnect Including Integrated Circuit Mounting
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| | 17323 |
Method Of Selective Synthesis Of Nanomaterials
The unique electrical, mechanical and optical properties of nanowires and nanotubes makes them attractive in a variety of applications. However, a significant obstacle to the application of these nanostructures is the difficulty in handling, maneuvering and integrating them with microelectronics to form a complete system. In particular, current synthesis processes for silicon nanowires and carbon nanotubes require high temperatures that can damage the microelectronics on which the nanostructures are being synthesized. To solve these problems, researchers at the University of California, Berkeley have developed a process for synthesizing nanostructures at a specified location inside a room-temperature chamber. This localized selective synthesis process can directly integrate either silicon nanowires or carbon nanotubes with larger-scale systems, such as foundry-based microelectronics, and it eliminates the need for subsequent assembly processes. This innovative approach is based on localized resistive heating of suspended microstructures to activate vapor-deposition synthesis, and it yields either silicon nanowires or carbon nanotubes. The process has synthesized nanowires that grow at 1 ?m/min, are 30-80 nm in diameter, and up to 10 ?m in length; and the process has synthesized nanotubes that grow at 0.25 ?m/min, are 10-50 nm in diameter and up to 5 ?m in length.
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| | 17271 |
Bulk Hydrophilic Imprinted Silica
The objective of molecular imprinting is to create solid materials containing chemical functionalities that are spatially organized by interactions with imprint (or template) molecules during the synthesis process. Subsequent removal of the imprint molecules leaves behind designed sites for the recognition of small molecules, making the material ideally suited for applications such as separations, chemical sensing and catalysis. A significant limitation to the use of bulk imprinted silica in catalytic applications has been due to the hydrophobic framework resulting from the materials synthesis process. Researchers at the University of California, Berkeley have developed a process for synthesizing a new class of bulk imprinted silicates with a hydrophilic framework, which circumvents these limitations. Imprinted sites consisting of up to two primary amines have been synthesized within hydrophilic microporous and mesoporous inorganic-oxide frameworks. The preparation of bulk-imprinted silicas is a step toward the development of imprinting as a general strategy for synthesizing materials-by-design.
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| | 17214 |
Method Of Forming Low Temperature Conductors Using Nanoparticles
Metallic conductors are technologically important as a means of interconnecting and contacting semiconducting devices, as well as in the formation of passive electronic components. For many applications, it is crucial that the conductor formation process occurs at a low temperature to ensure proper fabrication. However, common conductor formation methods have an annealing temperature of 200?C ? 400?C, greatly surpassing the minimum temperature that is required by industry. To solve this problem, researchers at the University of California, Berkeley have developed an innovative low temperature process that uses nanoparticles to fabricate conductors. Compared to previous conductor formation techniques that also use nanoparticles, this novel method involves a reduced evaporation temperature and reduced annealing temperature. The conductor formation process can be performed at plastic-compatible temperatures, thereby making this technology optimal for low-cost plastic applications such as RFID tags and displays.
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| | 17096 |
Photoconductive Nanowires
Researchers at the University of California, Berkeley have developed highly sensitive ultraviolet light sensors based on zinc oxide nanowires. Upon exposure to light of wavelength below 400 nm, the electrical resistivity of the semiconducting nanowires decreases by 4-5 orders of magnitude. ?Nanowire UV photodetector and optical switches?, H. Kind, H. Yan, M. Law, B. Messer, P. Yang, Adv. Mater. 14, 158, 2002
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| | 10249 |
Chemical Manufacture Of Nanostructured Materials
Multi-walled carbon nanotubes have several potential applications in hydrogen storage, supercapacitors, and structural composites. However, most of these applications depend upon a reliable source of high-quality, inexpensive nanomaterials. Current carbon nanotube production methods, which use high-temperature arc-discharge, drive production costs prohibitively high and limit their use to only small-scale applications.
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