Method of Making Nitrogen-Polar Devices Using Conventional Gallium Face Growth Techniques
Tech ID: 19389 / UC Case 2007-336-0
Brief Description
New method to fabricate III-nitride semiconductor devices on the nitrogen-face of layers using wafer bonding and substrate removal.Background
There are several methods of obtaining nitrogen-polar devices. The most direct method is to use a substrate that naturally provides for the N-polarity or by using surface treatments on substrates such as sapphire to generate the buffer that lead to N-polar devices.Description
Researchers at the University of California, Santa Barbara have developed a new method to fabricate III-nitride semiconductor devices on the nitrogen-face of layers using wafer bonding and substrate removal.Advantages
- Increased device performances
- Reductions in the sizes of passive components
- Potential for integration with conventional CMOS
Applications
- High Frequency Communication
- High Voltage Switching Applications
- LEDs
- Solar Cells
The technology is available for licensing.
PATENT STATUS
- Patent Pending
INVENTORS
- McCarthy, Lee S.
- Mishra, Umesh K.
- Rajan, Siddharth
- Suh, Chang Soo
Other Information
Categorized As
Related cases
2007-336-0
Keywords
gallium, nitrogen polar
Contact
Franco Caporale/ caporale@tia.ucsb.edu / tel: 805-893-2073. Please reference Tech ID #19389.
ADDITIONAL TECHNOLOGIES BY THESE INVENTORS
- Fabrication Of High Quality P-Type Gan And Alloys
- Growth Of High-Quality Insulating Gan
- Method To Reduce The Dislocation Density In Group Iii - Nitride Films
- Group Iii Nitride-Based Fets And Hemts With Reduced Trapping
- Group Iii Nitride-Based High Electron Mobility Transistor (Hemt) With Barrier/Space Layer
- Treatment To Shape The Electric Field In Electron Devices, Passivate The Dislocations And Point Defects, And Enhance The Luminescence Efficiency Of Optical Devices
- Polarization-Induced Tunnel Junction
- High Breakdown Enhancement Mode Gallium Nitride-Based HEMTS With Integrated Slant Field Plate
- Method To Fabricate Improved Group-III Nitride Transistor Devices
- Low Temperature Wafer Bonding For Microwave and Power Electronics


